Fast-Response Electrostatic Actuator Based on Nano-Gap
نویسندگان
چکیده
منابع مشابه
Fast-Response Electrostatic Actuator Based on Nano-Gap
The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using micr...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2017
ISSN: 2072-666X
DOI: 10.3390/mi8030078